Time Resolved Plasma Diagnostics

The investigation of phenomena in pulsed magnetron sputtering and cathodic arc deposition requires very fast diagnostics. We have developed an interferometer capable of measuring the line shapes of emission lines with very fast time resolution. The interferometer is of the Fizeau type which allows for parallel acquisition of a spectrum and when coupled with a fast camera [Spectropro] is capable of measuring Doppler broadened line shapes with nanosecond time resolution.