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The aim of this unit of study is to introduce manufacturing techniques at the micro- and nanoscale. The typical wafer materials for micro- and nanosystems are introduced, including their production methods and material properties. The unit of study will discuss, how structures can be fabricated with micrometer to nanometer precision by various lithography techniques. Thin film deposition, including evaporation, sputtering, chemical vapor deposition, atomic layer deposition, epitaxial growth among others, will be discussed. The material properties of the resulting thin films will be analyzed. Material removal by isotropic and anisotropic wet etching, as well as dry etching techniques such as reactive ion etching, ion beam etching or vapor etching will be studied. Assembly and interfacing methods including wafer bonding and wire bonding will be introduced. The students will learn, how to conceive a microfabrication process flow, and develop an understanding of the opportunities of manufacturing at the micro- and nanoscale.
Study level | Postgraduate |
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Academic unit | Aerospace, Mechanical and Mechatronic |
Credit points | 6 |
Prerequisites:
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(MECH2400 or MECH9400) and (MECH3660 or MECH8660 or MECH9660) |
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Corequisites:
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None |
Prohibitions:
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None |
Assumed knowledge:
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None |
At the completion of this unit, you should be able to:
This section lists the session, attendance modes and locations the unit is available in. There is a unit outline for each of the unit availabilities, which gives you information about the unit including assessment details and a schedule of weekly activities.
The outline is published 2 weeks before the first day of teaching. You can look at previous outlines for a guide to the details of a unit.
Session | MoA ? | Location | Outline ? |
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Semester 2 2024
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Normal day | Camperdown/Darlington, Sydney |
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Session | MoA ? | Location | Outline ? |
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Semester 2 2025
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Normal day | Camperdown/Darlington, Sydney |
Outline unavailable
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Session | MoA ? | Location | Outline ? |
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Semester 2 2020
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Normal day | Camperdown/Darlington, Sydney |
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Semester 2 2021
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Normal day | Camperdown/Darlington, Sydney |
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Semester 2 2021
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Normal day | Remote |
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Semester 2 2022
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Normal day | Camperdown/Darlington, Sydney |
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Semester 2 2022
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Normal day | Remote |
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Semester 2 2023
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Normal day | Camperdown/Darlington, Sydney |
View
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Find your current year census dates
This refers to the Mode of attendance (MoA) for the unit as it appears when you’re selecting your units in Sydney Student. Find more information about modes of attendance on our website.
If you see the ‘Departmental Permission’ tag below a session, it means you need faculty or school approval to enrol. This may be because it’s an advanced unit, clinical placement, offshore unit, internship or there are limited places available.
You will be prompted to apply for departmental permission when you select this unit in Sydney Student.
Read our information on departmental permission.
This unit requires departmental permission to ensure appropriate foundational knowledge is met. If the prerequisite unit/s were completed at the University of Sydney or if you are enrolled in the Master of Engineering or Master of Professional Engineering (Accelerated), your request does not require supporting documentation to be approved. If you have completed studies at another institution, you must include your transcript when submitting your permission request for review by the Faculty. Please note that spaces may be limited for this unit.