This unit teaches the student how to recognize where and how their theoretical skills can be applied to practical situations in the field of mechanical design. As a case study, a set of widely implemented Micro-Electro-Mechanical Systems (MEMS) is introduced, including Pressure Sensors, Microphones, Accelerometers, Gyroscopes and Micromirrors. Selected mechanical designs are presented and design choices are discussed with respect to their performance. Notions specific to microfabrication and the concept of scaling laws are introduced and elucidated at commonly implemented examples. The unit includes a hands-on design and modelling part introducing modern multi-physics finite element analysis. Dedicated tutorial sessions introduce the finite element modeling of Micro-Electro-Mechanical Systems. An emphasis is laid on the capability to couple multiple physics in a single model, including deformation of solids by electrostatic, electromagnetic or electro-thermal forces. The students will learn how to conceive and engineer a MEMS design, and predict performance by multi-physics finite element analysis.
Unit details and rules
Academic unit | Aerospace, Mechanical and Mechatronic |
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Credit points | 6 |
Prerequisites
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MECH2400 and MECH3460 |
Corequisites
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None |
Prohibitions
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MECH5416 |
Assumed knowledge
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(AMME1802 or ENGG1802) and AMME2301 and AMME2500 and MECH3361 |
Available to study abroad and exchange students | Yes |
Teaching staff
Coordinator | Niels Quack, niels.quack@sydney.edu.au |
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Lecturer(s) | Niels Quack, niels.quack@sydney.edu.au |
Tutor(s) | Steve Clark, steve.clark@sydney.edu.au |
Tony Xiao, tony.xiao@sydney.edu.au |