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Unit outline_

MECH8416: Design of Micro- and Nanosystems

Semester 1, 2024 [Normal day] - Camperdown/Darlington, Sydney

This unit teaches the student how to recognize where and how their theoretical skills can be applied to practical situations in the field of mechanical design. As a case study, a set of widely implemented Micro-Electro-Mechanical Systems (MEMS) is introduced, including Pressure Sensors, Microphones, Accelerometers, Gyroscopes and Micromirrors. Selected mechanical designs are presented and design choices are discussed with respect to their performance. Notions specific to microfabrication and the concept of scaling laws are introduced and elucidated at commonly implemented examples. The unit includes a hands-on design and modelling part introducing modern multi-physics finite element analysis. Dedicated tutorial sessions introduce the finite element modeling of Micro-Electro-Mechanical Systems. An emphasis is laid on the capability to couple multiple physics in a single model, including deformation of solids by electrostatic, electromagnetic or electro-thermal forces. The students will learn how to conceive and engineer a MEMS design, and predict performance by multi-physics finite element analysis.

Unit details and rules

Academic unit Aerospace, Mechanical and Mechatronic
Credit points 6
Prerequisites
? 
None
Corequisites
? 
None
Prohibitions
? 
MECH5416
Assumed knowledge
? 

ENGG1802 or AMME1802 - Eng Mechanics; balance of forces and moments; AMME2301 - Mechanics of Solids; 2 and 3 dimensional stress and strain; AMME2500 - Engineering Dynamics - dynamic forces and moments; MECH2400 - Mechanical Design 1; approach to design problems and report writing; and preparation of engineering drawing; MECH3460 - Mechanical design 2; means of applying fatigue analysis to a wide range of machine components

Available to study abroad and exchange students

No

Teaching staff

Coordinator Niels Quack, niels.quack@sydney.edu.au
Lecturer(s) Niels Quack, niels.quack@sydney.edu.au
Tutor(s) Shashank Gupta, shashank.gupta@sydney.edu.au
The census date for this unit availability is 2 April 2024
Type Description Weight Due Length
Presentation Interactive Peer Presentation
PresentHistory,Operation,Design,Performance&Application of a MEMS.SubmitPDF
10% Week 03 3 Minutes Presentation
Outcomes assessed: LO6 LO7
Participation Interactive Session
Flipped Classroom - Explain to and learn from Peers
5% Week 11 2h
Outcomes assessed: LO5 LO7 LO6
Presentation Final MEMS Design Project Presentation
Presentation of MEMS Design Project Results
25% Week 13 5 Minutes Presentation
Outcomes assessed: LO1 LO13 LO12 LO11 LO10 LO9 LO8 LO7 LO6 LO5 LO4 LO3 LO2
Assignment MEMS Project Final Report
Technical Report of MEMS Design in Form of a Scientific Journal Article
60% Week 13
Due date: 26 May 2024 at 23:59
n/a
Outcomes assessed: LO13 LO1 LO2 LO3 LO4 LO5 LO6 LO7 LO8 LO9 LO10 LO11 LO12

Assessment summary

  • Assignment 1: Individual presentation of a selected MEMS Design during lecture time in Week 3. The student can select from a suggestion of MEMS devices or choose any additional MEMS device. The presentation is not to exceed 3 minutes, with 5 content slides only: (history, working principle, mechanical design, performance and applications). A template will be provided on canvas. The pdf file is to be handed in, and will be shared with the class. Individual work, individual preparation required. (10%).
  • Assignment 2: Participate in an interactive session in week 11, where groups are formed, explaining MEMS device presented in the course to your peers, and interact to evaluate the MEMS design. Review of class material beforehand advised. (5%, active participation).
  • Assignment 3: MEMS Design Project. Present a design of a MEMS including a Finite Element Analysis Model. The assignment will assessed in 2 components: Final Project Presentation (25%), Final Project Report (60%).

Further information for each assessment can be found on Canvas.

Assessment criteria

The University awards common result grades, set out in the Coursework Policy 2014 (Schedule 1).

As a general guide, a high distinction indicates work of an exceptional standard, a distinction a very high standard, a credit a good standard, and a pass an acceptable standard.

Result name

Mark range

Description

High distinction

85 - 100

creative novel and effective process

Distinction

75 - 84

very thorough work with lateral consideration

Credit

65 - 74

excellent application to moderate problems

Pass

50 - 64

applied basic principles to simple problem

Fail

0 - 49

When you don’t meet the learning outcomes of the unit to a satisfactory standard.

For more information see guide to grades.

Late submission

In accordance with University policy, these penalties apply when written work is submitted after 11:59pm on the due date:

  • Deduction of 5% of the maximum mark for each calendar day after the due date.
  • After ten calendar days late, a mark of zero will be awarded.

This unit has an exception to the standard University policy or supplementary information has been provided by the unit coordinator. This information is displayed below:

5% per day for up to ten calendar days, after which a zero mark will be awarded

Academic integrity

The Current Student website provides information on academic integrity and the resources available to all students. The University expects students and staff to act ethically and honestly and will treat all allegations of academic integrity breaches seriously.

We use similarity detection software to detect potential instances of plagiarism or other forms of academic integrity breach. If such matches indicate evidence of plagiarism or other forms of academic integrity breaches, your teacher is required to report your work for further investigation.

Use of generative artificial intelligence (AI) and automated writing tools

You may only use generative AI and automated writing tools in assessment tasks if you are permitted to by your unit coordinator. If you do use these tools, you must acknowledge this in your work, either in a footnote or an acknowledgement section. The assessment instructions or unit outline will give guidance of the types of tools that are permitted and how the tools should be used.

Your final submitted work must be your own, original work. You must acknowledge any use of generative AI tools that have been used in the assessment, and any material that forms part of your submission must be appropriately referenced. For guidance on how to acknowledge the use of AI, please refer to the AI in Education Canvas site.

The unapproved use of these tools or unacknowledged use will be considered a breach of the Academic Integrity Policy and penalties may apply.

Studiosity is permitted unless otherwise indicated by the unit coordinator. The use of this service must be acknowledged in your submission as detailed on the Learning Hub’s Canvas page.

Outside assessment tasks, generative AI tools may be used to support your learning. The AI in Education Canvas site contains a number of productive ways that students are using AI to improve their learning.

Simple extensions

If you encounter a problem submitting your work on time, you may be able to apply for an extension of five calendar days through a simple extension.  The application process will be different depending on the type of assessment and extensions cannot be granted for some assessment types like exams.

Special consideration

If exceptional circumstances mean you can’t complete an assessment, you need consideration for a longer period of time, or if you have essential commitments which impact your performance in an assessment, you may be eligible for special consideration or special arrangements.

Special consideration applications will not be affected by a simple extension application.

Using AI responsibly

Co-created with students, AI in Education includes lots of helpful examples of how students use generative AI tools to support their learning. It explains how generative AI works, the different tools available and how to use them responsibly and productively.

Support for students

The Support for Students Policy 2023 reflects the University’s commitment to supporting students in their academic journey and making the University safe for students. It is important that you read and understand this policy so that you are familiar with the range of support services available to you and understand how to engage with them.

The University uses email as its primary source of communication with students who need support under the Support for Students Policy 2023. Make sure you check your University email regularly and respond to any communications received from the University.

Learning resources and detailed information about weekly assessment and learning activities can be accessed via Canvas. It is essential that you visit your unit of study Canvas site to ensure you are up to date with all of your tasks.

If you are having difficulties completing your studies, or are feeling unsure about your progress, we are here to help. You can access the support services offered by the University at any time:

Support and Services (including health and wellbeing services, financial support and learning support)
Course planning and administration
Meet with an Academic Adviser

WK Topic Learning activity Learning outcomes
Multiple weeks MEMS Design Project (Week 10 - 13) Project (40 hr) LO8 LO9 LO10 LO11 LO12 LO13
Students are expected to be spending time to do independent study while also working on completing assignments. Roughly 6-7 hours per week in weeks 1-9 (less during week 10-13, as a major part will be attributed to independent project work). Independent study (50 hr) LO1 LO2 LO3 LO4 LO5 LO6 LO7 LO8 LO9 LO10 LO11 LO12 LO13
Week 01 Introduction to Micro-Electro-Mechanical Systems (MEMS) Design Lecture (2 hr) LO1
Introduction to Finite Element Analysis (FEA) at the Microscale (Material Models, Anisotropy, Boundary Conditions, Loads) Tutorial (2 hr) LO8 LO9 LO10
Week 02 Introduction to Microfabrication Technologies and Scaling Laws Lecture (2 hr) LO2 LO4
Structural Mechanics FEA (Convergence, Nonlinearity, Meshing, Modal Analysis) Tutorial (2 hr) LO8 LO9 LO10
Week 03 Interactive Peer Presentations Presentation (2 hr) LO6 LO7
Structural Mechanics FEA (Thin Films, Intrinsic Stress) Tutorial (2 hr) LO8 LO9 LO10 LO11
Week 04 Micro-Mechanical Sensors, Microphones, Accelerometers Lecture (2 hr) LO1 LO2 LO3
Thermal FEA (Steady State and Transient Thermal Analysis) Tutorial (2 hr) LO8 LO9 LO10
Week 05 Micro-Mechanical Sensors, Gyroscopes, Pressure Sensors Lecture (2 hr) LO1 LO2 LO3
Guest Lecture and Tutorial on Multiphysics FEM Lecture and tutorial (2 hr) LO8 LO9 LO10
Week 06 Micro-Opto-Electromechanical Systems: Micromirror Design Lecture (2 hr) LO1 LO2 LO3
Week 07 Micro-Opto-Electromechanical Systems and their Applications in Consumer Electronics and Mobile Lecture (2 hr) LO3 LO5
Electro-Thermo-Mechanical Multiphysics FEA (Thermal Bimorph and Hot/Cold Arm Micro-Actuators) Tutorial (2 hr) LO8 LO9 LO10 LO11
Week 08 Micro-Opto-Electromechanical Systems and their Applications in Telecom Lecture (2 hr) LO3 LO5
Electromagnetic Actuator FEA for Micromirrors Tutorial (2 hr) LO8 LO9 LO10
Week 09 Electrostatic Actuator FEA Tutorial (2 hr) LO8 LO9 LO10 LO11
Week 10 Photonic Micro- and Nano-Electromechanical Systems Lecture (2 hr) LO3 LO5
Week 11 Interactive Session Workshop (2 hr) LO1 LO2 LO3 LO4 LO5
Week 12 Photonic MEMS and Q&A Lecture (2 hr) LO3 LO5
Week 13 Final MEMS Design Project Presentations Presentation (4 hr) LO1 LO2 LO3 LO4 LO5 LO6 LO13

Study commitment

Typically, there is a minimum expectation of 1.5-2 hours of student effort per week per credit point for units of study offered over a full semester. For a 6 credit point unit, this equates to roughly 120-150 hours of student effort in total.

Required readings

Readings and course material available on Canvas.

Learning outcomes are what students know, understand and are able to do on completion of a unit of study. They are aligned with the University's graduate qualities and are assessed as part of the curriculum.

At the completion of this unit, you should be able to:

  • LO1. sketch and explain the working principle of a selected MEMS design
  • LO2. draw a microfabrication process flow to manufacture a MEMS device
  • LO3. compare advantages and drawbacks of a selected MEMS design
  • LO4. analyze the scaling laws for mechanical design parameters
  • LO5. interprete and evaluate the mechanical design choices of a commercially available MEMS device
  • LO6. perform independent research on scientific and technical literature as well as product datasheets on a selected MEMS device
  • LO7. summarize history, working principle, mechanical design, performance and applications of a selected MEMS device in a presentation
  • LO8. create a finite element model of a selected MEMS device
  • LO9. explain the main components of a multiphysics finite element analysis
  • LO10. set up, execute, solve and interprete the results of a MEMS Multiphysics finite element analysis
  • LO11. perform parameter variation of a mechanical design and discuss performance trends
  • LO12. create the mechanical design of a selected MEMS device and discuss the performance based on a finite element analysis
  • LO13. summarize the results of a MEMS design in a presentation and in a technical report

Graduate qualities

The graduate qualities are the qualities and skills that all University of Sydney graduates must demonstrate on successful completion of an award course. As a future Sydney graduate, the set of qualities have been designed to equip you for the contemporary world.

GQ1 Depth of disciplinary expertise

Deep disciplinary expertise is the ability to integrate and rigorously apply knowledge, understanding and skills of a recognised discipline defined by scholarly activity, as well as familiarity with evolving practice of the discipline.

GQ2 Critical thinking and problem solving

Critical thinking and problem solving are the questioning of ideas, evidence and assumptions in order to propose and evaluate hypotheses or alternative arguments before formulating a conclusion or a solution to an identified problem.

GQ3 Oral and written communication

Effective communication, in both oral and written form, is the clear exchange of meaning in a manner that is appropriate to audience and context.

GQ4 Information and digital literacy

Information and digital literacy is the ability to locate, interpret, evaluate, manage, adapt, integrate, create and convey information using appropriate resources, tools and strategies.

GQ5 Inventiveness

Generating novel ideas and solutions.

GQ6 Cultural competence

Cultural Competence is the ability to actively, ethically, respectfully, and successfully engage across and between cultures. In the Australian context, this includes and celebrates Aboriginal and Torres Strait Islander cultures, knowledge systems, and a mature understanding of contemporary issues.

GQ7 Interdisciplinary effectiveness

Interdisciplinary effectiveness is the integration and synthesis of multiple viewpoints and practices, working effectively across disciplinary boundaries.

GQ8 Integrated professional, ethical, and personal identity

An integrated professional, ethical and personal identity is understanding the interaction between one’s personal and professional selves in an ethical context.

GQ9 Influence

Engaging others in a process, idea or vision.

Outcome map

Learning outcomes Graduate qualities
GQ1 GQ2 GQ3 GQ4 GQ5 GQ6 GQ7 GQ8 GQ9

This section outlines changes made to this unit following staff and student reviews.

The UoS has been updated taking into account USS feedback.

Disclaimer

The University reserves the right to amend units of study or no longer offer certain units, including where there are low enrolment numbers.

To help you understand common terms that we use at the University, we offer an online glossary.