Outline

Overview

This unit teaches the student how to recognize where and how their theoretical skills can be applied to practical situations in the field of mechanical design. As a case study, a set of widely implemented Micro-Electro-Mechanical Systems (MEMS) is introduced, including Pressure Sensors, Microphones, Accelerometers, Gyroscopes and Micromirrors. Selected mechanical designs are presented and design choices are discussed with respect to their performance. Notions specific to microfabrication and the concept of scaling laws are introduced and elucidated at commonly implemented examples. The unit includes a hands-on design and modelling part introducing modern multi-physics finite element analysis. Dedicated tutorial sessions introduce the finite element modeling of Micro-Electro-Mechanical Systems. An emphasis is laid on the capability to couple multiple physics in a single model, including deformation of solids by electrostatic, electromagnetic or electro-thermal forces. The students will learn how to conceive and engineer a MEMS design, and predict performance by multi-physics finite element analysis.

Unit details and rules

Academic unit	Aerospace, Mechanical and Mechatronic
Credit points	6
Prerequisites ?	None
Corequisites ?	None
Prohibitions ?	MECH5416
Assumed knowledge ?	ENGG1802 or AMME1802 - Eng Mechanics; balance of forces and moments; AMME2301 - Mechanics of Solids; 2 and 3 dimensional stress and strain; AMME2500 - Engineering Dynamics - dynamic forces and moments; MECH2400 - Mechanical Design 1; approach to design problems and report writing; and preparation of engineering drawing; MECH3460 - Mechanical design 2; means of applying fatigue analysis to a wide range of machine components
Available to study abroad and exchange students	No

Teaching staff

Coordinator	Niels Quack, niels.quack@sydney.edu.au
Lecturer(s)	Niels Quack, niels.quack@sydney.edu.au
Tutor(s)	Shashank Gupta, shashank.gupta@sydney.edu.au

Assessment

The census date for this unit availability is 2 April 2024

Details
Criteria

Type	Description	Weight	Due	Length
Presentation	Interactive Peer Presentation PresentHistory,Operation,Design,Performance&Application of a MEMS.SubmitPDF	10%	Week 03	3 Minutes Presentation
Outcomes assessed:
Participation	Interactive Session Flipped Classroom - Explain to and learn from Peers	5%	Week 11	2h
Outcomes assessed:
Presentation	Final MEMS Design Project Presentation Presentation of MEMS Design Project Results	25%	Week 13	5 Minutes Presentation
Outcomes assessed:
Assignment	MEMS Project Final Report Technical Report of MEMS Design in Form of a Scientific Journal Article	60%	Week 13 Due date: 26 May 2024 at 23:59	n/a
Outcomes assessed:

Assessment summary

Assignment 1: Individual presentation of a selected MEMS Design during lecture time in Week 3. The student can select from a suggestion of MEMS devices or choose any additional MEMS device. The presentation is not to exceed 3 minutes, with 5 content slides only: (history, working principle, mechanical design, performance and applications). A template will be provided on canvas. The pdf file is to be handed in, and will be shared with the class. Individual work, individual preparation required. (10%).
Assignment 2: Participate in an interactive session in week 11, where groups are formed, explaining MEMS device presented in the course to your peers, and interact to evaluate the MEMS design. Review of class material beforehand advised. (5%, active participation).
Assignment 3: MEMS Design Project. Present a design of a MEMS including a Finite Element Analysis Model. The assignment will assessed in 2 components: Final Project Presentation (25%), Final Project Report (60%).

Further information for each assessment can be found on Canvas.

Assessment criteria

The University awards common result grades, set out in the Coursework Policy 2014 (Schedule 1).

As a general guide, a high distinction indicates work of an exceptional standard, a distinction a very high standard, a credit a good standard, and a pass an acceptable standard.

Result name	Mark range	Description
High distinction	85 - 100	creative novel and effective process
Distinction	75 - 84	very thorough work with lateral consideration
Credit	65 - 74	excellent application to moderate problems
Pass	50 - 64	applied basic principles to simple problem
Fail	0 - 49	When you don’t meet the learning outcomes of the unit to a satisfactory standard.

For more information see guide to grades.

Late submission

In accordance with University policy, these penalties apply when written work is submitted after 11:59pm on the due date:

Deduction of 5% of the maximum mark for each calendar day after the due date.
After ten calendar days late, a mark of zero will be awarded.

This unit has an exception to the standard University policy or supplementary information has been provided by the unit coordinator. This information is displayed below:

5% per day for up to ten calendar days, after which a zero mark will be awarded

Academic integrity

The Current Student website provides information on academic integrity and the resources available to all students. The University expects students and staff to act ethically and honestly and will treat all allegations of academic integrity breaches seriously.

We use similarity detection software to detect potential instances of plagiarism or other forms of academic integrity breach. If such matches indicate evidence of plagiarism or other forms of academic integrity breaches, your teacher is required to report your work for further investigation.

Use of generative artificial intelligence (AI) and automated writing tools

You may only use generative AI and automated writing tools in assessment tasks if you are permitted to by your unit coordinator. If you do use these tools, you must acknowledge this in your work, either in a footnote or an acknowledgement section. The assessment instructions or unit outline will give guidance of the types of tools that are permitted and how the tools should be used.

Your final submitted work must be your own, original work. You must acknowledge any use of generative AI tools that have been used in the assessment, and any material that forms part of your submission must be appropriately referenced. For guidance on how to acknowledge the use of AI, please refer to the AI in Education Canvas site.

The unapproved use of these tools or unacknowledged use will be considered a breach of the Academic Integrity Policy and penalties may apply.

Studiosity is permitted unless otherwise indicated by the unit coordinator. The use of this service must be acknowledged in your submission as detailed on the Learning Hub’s Canvas page.

Outside assessment tasks, generative AI tools may be used to support your learning. The AI in Education Canvas site contains a number of productive ways that students are using AI to improve their learning.

Learning support

Simple extensions

If you encounter a problem submitting your work on time, you may be able to apply for an extension of five calendar days through a simple extension.  The application process will be different depending on the type of assessment and extensions cannot be granted for some assessment types like exams.

Special consideration

If exceptional circumstances mean you can’t complete an assessment, you need consideration for a longer period of time, or if you have essential commitments which impact your performance in an assessment, you may be eligible for special consideration or special arrangements.

Special consideration applications will not be affected by a simple extension application.

Using AI responsibly

Co-created with students, AI in Education includes lots of helpful examples of how students use generative AI tools to support their learning. It explains how generative AI works, the different tools available and how to use them responsibly and productively.

Support for students

The Support for Students Policy 2023 reflects the University’s commitment to supporting students in their academic journey and making the University safe for students. It is important that you read and understand this policy so that you are familiar with the range of support services available to you and understand how to engage with them.

The University uses email as its primary source of communication with students who need support under the Support for Students Policy 2023. Make sure you check your University email regularly and respond to any communications received from the University.

Learning resources and detailed information about weekly assessment and learning activities can be accessed via Canvas. It is essential that you visit your unit of study Canvas site to ensure you are up to date with all of your tasks.

If you are having difficulties completing your studies, or are feeling unsure about your progress, we are here to help. You can access the support services offered by the University at any time:

Support and Services (including health and wellbeing services, financial support and learning support)
Course planning and administration
Meet with an Academic Adviser

Weekly schedule

WK	Topic	Learning activity
Multiple weeks	MEMS Design Project (Week 10 - 13)	Project (40 hr)
Multiple weeks	Students are expected to be spending time to do independent study while also working on completing assignments. Roughly 6-7 hours per week in weeks 1-9 (less during week 10-13, as a major part will be attributed to independent project work).	Independent study (50 hr)
Week 01	Introduction to Micro-Electro-Mechanical Systems (MEMS) Design	Lecture (2 hr)
Week 01	Introduction to Finite Element Analysis (FEA) at the Microscale (Material Models, Anisotropy, Boundary Conditions, Loads)	Tutorial (2 hr)
Week 02	Introduction to Microfabrication Technologies and Scaling Laws	Lecture (2 hr)
Week 02	Structural Mechanics FEA (Convergence, Nonlinearity, Meshing, Modal Analysis)	Tutorial (2 hr)
Week 03	Interactive Peer Presentations	Presentation (2 hr)
Week 03	Structural Mechanics FEA (Thin Films, Intrinsic Stress)	Tutorial (2 hr)
Week 04	Micro-Mechanical Sensors, Microphones, Accelerometers	Lecture (2 hr)
Week 04	Thermal FEA (Steady State and Transient Thermal Analysis)	Tutorial (2 hr)
Week 05	Micro-Mechanical Sensors, Gyroscopes, Pressure Sensors	Lecture (2 hr)
Week 05	Guest Lecture and Tutorial on Multiphysics FEM	Lecture and tutorial (2 hr)
Week 06	Micro-Opto-Electromechanical Systems: Micromirror Design	Lecture (2 hr)
Week 07	Micro-Opto-Electromechanical Systems and their Applications in Consumer Electronics and Mobile	Lecture (2 hr)
Week 07	Electro-Thermo-Mechanical Multiphysics FEA (Thermal Bimorph and Hot/Cold Arm Micro-Actuators)	Tutorial (2 hr)
Week 08	Micro-Opto-Electromechanical Systems and their Applications in Telecom	Lecture (2 hr)
Week 08	Electromagnetic Actuator FEA for Micromirrors	Tutorial (2 hr)
Week 09	Electrostatic Actuator FEA	Tutorial (2 hr)
Week 10	Photonic Micro- and Nano-Electromechanical Systems	Lecture (2 hr)
Week 11	Interactive Session	Workshop (2 hr)
Week 12	Photonic MEMS and Q&A	Lecture (2 hr)
Week 13	Final MEMS Design Project Presentations	Presentation (4 hr)

Study commitment

Typically, there is a minimum expectation of 1.5-2 hours of student effort per week per credit point for units of study offered over a full semester. For a 6 credit point unit, this equates to roughly 120-150 hours of student effort in total.

Required readings

Readings and course material available on Canvas.

Learning outcomes

Learning outcomes are what students know, understand and are able to do on completion of a unit of study. They are aligned with the University's graduate qualities and are assessed as part of the curriculum.

Outcomes
Graduate qualities

At the completion of this unit, you should be able to:

LO1. sketch and explain the working principle of a selected MEMS design
LO2. draw a microfabrication process flow to manufacture a MEMS device
LO3. compare advantages and drawbacks of a selected MEMS design
LO4. analyze the scaling laws for mechanical design parameters
LO5. interprete and evaluate the mechanical design choices of a commercially available MEMS device
LO6. perform independent research on scientific and technical literature as well as product datasheets on a selected MEMS device
LO7. summarize history, working principle, mechanical design, performance and applications of a selected MEMS device in a presentation
LO8. create a finite element model of a selected MEMS device
LO9. explain the main components of a multiphysics finite element analysis
LO10. set up, execute, solve and interprete the results of a MEMS Multiphysics finite element analysis
LO11. perform parameter variation of a mechanical design and discuss performance trends
LO12. create the mechanical design of a selected MEMS device and discuss the performance based on a finite element analysis
LO13. summarize the results of a MEMS design in a presentation and in a technical report

Graduate qualities

The graduate qualities are the qualities and skills that all University of Sydney graduates must demonstrate on successful completion of an award course. As a future Sydney graduate, the set of qualities have been designed to equip you for the contemporary world.

GQ1	Depth of disciplinary expertise Deep disciplinary expertise is the ability to integrate and rigorously apply knowledge, understanding and skills of a recognised discipline defined by scholarly activity, as well as familiarity with evolving practice of the discipline.
GQ2	Critical thinking and problem solving Critical thinking and problem solving are the questioning of ideas, evidence and assumptions in order to propose and evaluate hypotheses or alternative arguments before formulating a conclusion or a solution to an identified problem.
GQ3	Oral and written communication Effective communication, in both oral and written form, is the clear exchange of meaning in a manner that is appropriate to audience and context.
GQ4	Information and digital literacy Information and digital literacy is the ability to locate, interpret, evaluate, manage, adapt, integrate, create and convey information using appropriate resources, tools and strategies.
GQ5	Inventiveness Generating novel ideas and solutions.
GQ6	Cultural competence Cultural Competence is the ability to actively, ethically, respectfully, and successfully engage across and between cultures. In the Australian context, this includes and celebrates Aboriginal and Torres Strait Islander cultures, knowledge systems, and a mature understanding of contemporary issues.
GQ7	Interdisciplinary effectiveness Interdisciplinary effectiveness is the integration and synthesis of multiple viewpoints and practices, working effectively across disciplinary boundaries.
GQ8	Integrated professional, ethical, and personal identity An integrated professional, ethical and personal identity is understanding the interaction between one’s personal and professional selves in an ethical context.
GQ9	Influence Engaging others in a process, idea or vision.

Outcome map

Learning outcomes	Graduate qualities
Learning outcomes

Responding to student feedback

This section outlines changes made to this unit following staff and student reviews.

The UoS has been updated taking into account USS feedback.

Disclaimer

The University reserves the right to amend units of study or no longer offer certain units, including where there are low enrolment numbers.

To help you understand common terms that we use at the University, we offer an online glossary.

Current students

Overview

Overview

Unit details and rules

Teaching staff

Assessment

Assessment

Assessment summary

Assessment criteria

Late submission

Academic integrity

Learning support

Learning support

Simple extensions

Special consideration

Using AI responsibly

Support for students

Weekly schedule

Weekly schedule

Study commitment

Required readings

Learning outcomes

Learning outcomes

Graduate qualities

Outcome map

Responding to student feedback

Responding to student feedback

Disclaimer

On this page

Useful links

Media

Student links

About us

Connect

Current students

MECH8416: Design of Micro- and Nanosystems

Semester 1, 2024 [Normal day] - Camperdown/Darlington, Sydney

Overview

Overview

Unit details and rules

Teaching staff

Assessment

Assessment

Assessment summary

Assessment criteria

Late submission

Academic integrity

Learning support

Learning support

Simple extensions

Special consideration

Using AI responsibly

Support for students

Weekly schedule

Weekly schedule

Study commitment

Required readings

Learning outcomes

Learning outcomes

Graduate qualities

Outcome map

Responding to student feedback

Responding to student feedback

Disclaimer

On this page

Useful links

Media

Student links

About us

Connect