The Research and Prototype Foundry offers instruments for the fabrication of devices and structures with features on the micro and nanoscale, with specialised processes allowing users to make devices and prototype new ideas.
The Research and Prototype Foundry, a Core Research Facility based at the Sydney Nanoscience Hub and a member of the Australian National Fabrication Facility Network, enables the development of optical chips, electronic devices and new quantum science and technology via outstanding lithography, etching, deposition and metrology capabilities.
We provide tools that allow lithographic patterning with feature sizes smaller than 10 nanometers using state-of-the-art electron beam lithography and over length scales of centimetres using the i-line stepper. Such precision is possible by housing our instruments in a purpose-built cleanroom that provides an environment with extremely precise regulation of temperature, humidity, light and air composition, vibrations, and electromagnetic interference.
Combined with our etching and deposition tools, these capabilities provide a comprehensive fabrication facility for a range of materials and structures.
Explore below our broad range of instruments. Our in-house technical staff also offer a range of value-adding services to assist users and their research projects, and we welcome enquiries from external clients requiring bespoke research and testing services.
Want to access the RPF Cleanroom? You will need to attend one if the RPF's Cleanroom Inductions which is scheduled on the first Tuesday of the month.